Methodology for the Modeling and Simulation of Microsystems formatIsbn:Hardcover - 9780792383062 als nur lauwarmer Quatsch mit

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Methodology for the Modeling and Simulation of Microsystems formatIsbn:Hardcover - 9780792383062 als nur lauwarmer Quatsch mitOver the past two decades, technologies for microsystems fabrication have made considerable progress. This has made possible a large variety of new commercial devices ranging, for example, from integrated pressure and acceleration microsensors to active micromirror arrays for image projection. In the near future, there will be a number of new devices, which will be commercialized in many application areas. The field of microsystems is characterized by